Technology
Inpria, a JSR Company, is the world leader in metal oxide photoresist design, development and manufacturing.
By design, Inpria photoresists enable patterning at exceptionally small pitches and feature sizes. Our materials are elegantly designed from the atoms up for optimal EUV absorption and photon capture performance. By absorbing more of the light from the EUV scanner, Inpria photoresists reduce the photon shot noise otherwise amplified in conventional Chemically Amplified Resists. Furthermore, by removing the acid diffusion mechanism characteristic of conventional photoresists, patterning resolution is further improved.
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All of these characteristics derive from the unique molecular cluster composition of our resists, and our small, highly homogeneous building blocks. Organometallic clusters with a tin-oxide core serve as the foundation of our chemistry, not nanoparticles. These organometallic building blocks are a fraction of the size of polymers found in traditional polymer-based resists, thereby delivering superior resolution. Inpria resists have fewer components than organic photoresists which improves material homogeneity and device yield.
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As metal oxides with unparalleled etch selectivity, Inpria photoresists enable simpler manufacturing flows and novel chip architectures.
Products
Inpria manufactures and sells a suite of EUV metal oxide photoresists.
Our photoresists are intentionally designed, optimized and manufactured to meet industry specifications that span resolution, sensitivity, linewidth roughness, and integration into manufacturing flows.
Working together with our partners we provide our customers with a holistic product solution that includes photoresists, developer and other ancillary materials.
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We produce EUV photoresists in our advanced manufacturing plant in Corvallis, Oregon. The facility is designed, built and managed to meet stringent semiconductor industry standards.
Quality management systems are the backbone of our operations and features. Our advanced process automation supports raw materials through final product QC and includes integrated Statistical Process Control throughout manufacturing.
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Our global supply chain consists of established tier one semiconductor industry suppliers to ensure quality and reliability in Inpria’s products.
Customers
Semiconductor manufacturing is an incredibly complex process involving countless discrete systems, materials, and process steps. As the world’s most advanced lithography process, EUV Lithography requires active collaboration and co-development between customers and suppliers. Thus, Inpria engages deeply with our customers – semiconductor manufacturers that have adopted EUV lithography – to ensure that we deliver the best product for each customer’s specific needs.
About Us
Inpria was founded in 2007 as a spin-out from Oregon State University’s Department of Chemistry. Since then we’ve complemented our technical founders with a diverse team with decades of experience working at organizations throughout the semiconductor industry. Inpria was acquired and became a JSR Company in 2021.
Inpria Quality & EHS Policies
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Inpria will meet or exceed all Quality expectations and applicable requirements by relevant interested parties.
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Inpria will establish and monitor Quality objectives in line with its strategic direction to continually improve its performance.
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Inpria will protect the environment and prevent pollution through sound business practices and emergent technologies.
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Inpria will ensure the provision of healthy and safe working conditions to minimize work-related injury and illness, both within Inpria’s workforce and to other interested parties.
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Inpria will meet or exceed all applicable Municipal, State, Federal, legal requirements, and customer compliance obligations.
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Inpria will facilitate continual improvement of the EHS Management System to drive innovation, raise resiliency, and increase efficiency.
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Inpria will promote reasonable transparency to establish communication and trust at all levels and to all interested parties.
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Inpria will encourage worker consultation and engagement to understand process risks and opportunities.
Latest News
Inpria Co-Developing Metal Oxide Resist with SK hynix to Reduce Complexity of Patterning for Next-Generation DRAM
August 2, 2022
JSR Closes Deal to Acquire EUV Pioneer Inpria Corporation
November 8, 2021
JSR Agrees to Acquire EUV Pioneer Inpria Corporation
September 17, 2021
Careers
We are always looking for excellent candidates to join our team!
Please send a note to careers@inpria.com to learn more.
Contact
1100 NE Circle Blvd., Suite 360
Corvallis, Oregon 97330