Metal Oxide Photoresists

Realize the full potential of EUV Lithography, today.

Technology

Inpria, a JSR Company, is the world leader in metal oxide photoresist design, development and manufacturing.

By design, Inpria photoresists enable patterning at exceptionally small pitches and feature sizes.  Our materials are elegantly designed from the atoms up for optimal EUV absorption and photon capture performance. By absorbing more of the light from the EUV scanner, Inpria photoresists reduce the photon shot noise otherwise amplified in conventional Chemically Amplified Resists.  Furthermore, by removing the acid diffusion mechanism characteristic of conventional photoresists, patterning resolution is further improved.

All of these characteristics derive from the unique molecular cluster composition of our resists, and our small, highly homogeneous building blocks. Organometallic clusters with a tin-oxide core serve as the foundation of our chemistry, not nanoparticles. These organometallic building blocks are a fraction of the size of polymers found in traditional polymer-based resists, thereby delivering superior resolution. Inpria resists have fewer components than organic photoresists which improves material homogeneity and device yield.

As metal oxides with unparalleled etch selectivity, Inpria photoresists enable simpler manufacturing flows and novel chip architectures. 

Products

Inpria manufactures and sells a suite of EUV metal oxide photoresists.

Our photoresists are intentionally designed, optimized and manufactured to meet industry specifications that span resolution, sensitivity, linewidth roughness, and integration into manufacturing flows.

Working together with our partners we provide our customers with a holistic product solution that includes photoresists, developer and other ancillary materials.

We produce EUV photoresists in our advanced manufacturing plant in Corvallis, Oregon. The facility is designed, built and managed to meet stringent semiconductor industry standards.

Quality management systems are the backbone of our operations and features. Our advanced process automation supports raw materials through final product QC and includes integrated Statistical Process Control throughout manufacturing.

Our global supply chain consists of established tier one semiconductor industry suppliers to ensure quality and reliability in Inpria’s products.

Customers

Semiconductor manufacturing is an incredibly complex process involving countless discrete systems, materials, and process steps. As the world’s most advanced lithography process, EUV Lithography requires active collaboration and co-development between customers and suppliers. Thus, Inpria engages deeply with our customers – semiconductor manufacturers that have adopted EUV lithography – to ensure that we deliver the best product for each customer’s specific needs.

About Us

Inpria was founded in 2007 as a spin-out from Oregon State University’s Department of Chemistry. Since then we’ve complemented our technical founders with a diverse team with decades of experience working at organizations throughout the semiconductor industry. Inpria was acquired and became a JSR Company in 2021.

Careers

We are always looking for excellent candidates to join our team!

Please send a note to careers@inpria.com to learn more.

Contact

 

  1100 NE Circle Blvd., Suite 360
Corvallis, Oregon 97330